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Labmanager Introduction. 2.

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LabManager4.o use equipment x Info x O https://labmanager.dtu.dkffunction.php?module= LabManager for DTU Favourites List Change Status Booking Wafers Nanolab Orderlines Edit Profile Front Page Si Etch 2: KOH Si Etch 3: KOH LabAOviser 2024-05-22 07.47•.56 2024-05-22 08.07.29 2024-05-22 09:31: 17 2024-05-22 09' 3049 2024-05-21 162816 2024-05-22 0800.20 Process Develop Spin Coater: LabSpin 03 Titan E-Cell eo-300ST XPS K-Apha XRD smartLab My Bookings Today Equipment RCA ]emunk 'kiesan' •shuya• Ready for use Micros on Lyngby OTU Fysik DTI_I Fysik DTL' Nanolab Research DTU Nanolab Academic Collaborations DTU Fotonik (Electro) User/ Opera tor mmat I Chou mmat End 15:00 2024-05-23 08:30 Headline Calendar Action 12:00 13:00 Furnace: Boron Drive-in and Pre-dep(A1) Ready tor oxidation and boron doping Equipment in 'Service' / 'Limited Use' / 'Out of use' or Bypassed Equipment o-TestT001 2PP printer AFEG 250 Analytical ESEM er TMAH Manual E-Beam Evaporator (Temescal) EllipsometerVASE hione Ion Milling Fume hood OT Acids/bases Furnace: LPCvD TEOS (B3) Hardness tester Hot embosser 1 Limited use Limited use Obt or use Obt ot use Being Serviced Being Sewiced Limited use Limited use Limited use Expected Readv Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Limited use Laser & galvo SCU replaced multiple stage broken and weird lines in low vac being moved back to building 347 Motor controller problem Wafer broke in a chamber Service updating software not operabonal Narm on time hood Deposition rate iS not so Stable (run to run) Power fluctuations contact nanolab before use no e-beam Limited use New bath - new rules Yuent Loq Fuent L OG Cvenl Log Event Log Fuent Log Cvenl Log Event Log Fuent Log Cvent Log Loq Fuent L 03 Cvent Log Event Log Stop Stop Stop Event Log Stat* Chances State Changes Stale Changes State Changes State Changes State Changes ' Stale Changes Stats Changes Statp Changer, State Changes Stat* Chances State Changes State Changes State Changes State Changes.

LabManager4.o use equipment x Info x O https://labmanager.dtu.dkffunction.php?module= LabManager for DTU Favourites List Change Status Booking Wafers Nanolab Orderlines Edit Profile Front Page Si Etch 2: KOH Si Etch 3: KOH LabAOviser 2024-05-22 07.47•.56 2024-05-22 08.07.29 2024-05-22 09:31: 17 2024-05-22 09' 3049 2024-05-21 162816 2024-05-22 0800.20 Process Develop Spin Coater: LabSpin 03 Titan E-Cell eo-300ST XPS K-Apha XRD smartLab My Bookings Today Equipment RCA ]emunk 'kiesan' •shuya• Ready for use Micros on Lyngby OTU Fysik DTI_I Fysik DTL' Nanolab Research DTU Nanolab Academic Collaborations DTU Fotonik (Electro) User/ Opera tor mmat I Chou mmat End 15:00 2024-05-23 08:30 Headline Calendar Action 12:00 13:00 Furnace: Boron Drive-in and Pre-dep(A1) Ready tor oxidation and boron doping Equipment in 'Service' / 'Limited Use' / 'Out of use' or Bypassed Equipment o-TestT001 2PP printer AFEG 250 Analytical ESEM er TMAH Manual E-Beam Evaporator (Temescal) EllipsometerVASE hione Ion Milling Fume hood OT Acids/bases Furnace: LPCvD TEOS (B3) Hardness tester Hot embosser 1 Limited use Limited use Obt or use Obt ot use Being Serviced Being Sewiced Limited use Limited use Limited use Expected Readv Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Not set Limited use Laser & galvo SCU replaced multiple stage broken and weird lines in low vac being moved back to building 347 Motor controller problem Wafer broke in a chamber Service updating software not operabonal Narm on time hood Deposition rate iS not so Stable (run to run) Power fluctuations contact nanolab before use no e-beam Limited use New bath - new rules Yuent Loq Fuent L OG Cvenl Log Event Log Fuent Log Cvenl Log Event Log Fuent Log Cvent Log Loq Fuent L 03 Cvent Log Event Log Stop Stop Stop Event Log Stat* Chances State Changes Stale Changes State Changes State Changes State Changes ' Stale Changes Stats Changes Statp Changer, State Changes Stat* Chances State Changes State Changes State Changes State Changes.

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I DTIJ X O https://labmanager.dtu.dk/function.php?moduIe:Machine&view=currentinfo LabManager for DTU Nanolab process Develop Help DTIJ mm-at Info Front Page General Info Contact Into PEOPLE CURRENTLY IN CR 346 Chemicals Maps 01 Equipment IT • Data processors FFIJ Change Into TSI Cleanroom Sensors TechForum Slides Customer Surveys With replies Equipment Use equipment Favourites Logs Change Status Flow editor Track Sample Booking Booking Daily Calendar Weekly Calendar Monthly Calendar Shop wafers Material Prices Time 2024-05-21 10•.34.-18 2024-05-22 2024-05-22 2024-05-22 2024-05-22 2024-05-22 Orders Orderlines End Time Stop Stup Stop Stop Stag Stop Stag Stop Stag Stap Stag Stap My Account Edit Profile Organizationsprojects Competences Competence history Mail Preferences Mails Sent to me Process' nfo Lab,avWiS er Find our Cleanroom calendar here: Equipment Being Used Equipment 30 printer AFEG 250 Analytical ESEM Aigner. Maskless 01 (ML-A1) Aigner. MaskleSS 02 (MCA2) Developer. UV•lithography DRIE-Pegasus ORE-Pegasus 3 E•Beam Evaporator (10-POCketS) E-Beam writer 9500 Hotplate 1 (SU8) IBEngso lontab 300 ICP Metal Etch NILT Oxford Plasmapro 100 Process log Open open Open Open Open Open User •s204562 on behalf of •s204736• 'elelop' tabla' 'elelop' leobe• •samhs• jwehar• •mohrant •andrma• Yitchen• OTU Nanolab DTU Mekanik (Construct) DTU Nanolab Research Nanolab DTU Fysik DTU Fotonik (Electro) Nanolab DTL' Fotonik (Electro) DTU Nanolab Industrial Collaborabons Fotonik (Electro) KU - Requisibon 6922-00200 DTL' Nanolab Research NIL Technology NIL Technology NIL Technology 2024-05-22 2024-05-22 2024-05-22 2024-05-22 2024-05-22 09-.1231.

O https://labmanager.dtu.dk/function.php?module="/achine&view=view&page_id=169 LabManager for DTU Nanolab process Develop Help DTIJ mm-at Equipment Info Eq u i pment ment name or use 314r307 Last Used Most popular Ready Again.

I DTIJ X O https://labmanager.dtu.dk/function.php?module="/achine&view=view&page_id=169 LabManager for DTU Nanolab process Develop Help DTIJ mm-at Equipment Info Eq u i pment n 00 Of: *ten tor use, 314/307 Fumace: LPCVD Poly-Si (C) (84) (Readytor use) Furnace: cpcvo Roly-Si (€2) (Reatytor use) Last Used LabChart Most popular Ready Again Poly Si etch (Reatytor use) Si Etch 1: KOH (Already in use) Si Etch 2 KOH (Already in use) Si Etch 3; KOH (Already in use) Wet bench 01; Si etch (Readytor use) Booking rules ood 06: Si etch LinkS Llsage Log Logs BOO k i ng Cha nge Info pages Basic into Name Long na me usa ge Location Categ orv CuertLcg Status Changes Status Log Plccess L cg This equipment cannot be booked Charqé Status Cross Contamnation Price and coverage Description Responsible Group Email regarding this Ct info Fume hood 06: Si etch Fume hood 06: Si etch 3.034 (#373) Fume hood 06: Si etch Not in use Not bookable. No charge. Fume hood for etching silicon in the built in bath Si etch 3 KOH' and for processes related to electroplating. Wet Chemistry wetchemistry@danchip.dtu_dk Ifyou have questions please contact the Wet Chemistry group on wetChemiStm@danChip.flJ.dk.

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